TY  - JOUR
AU  - Ravikiran Attota
AU  - Hyeonggon Kang
AU  - Keana Scott
AU  - Richard Allen
AU  - Andras Vladar
AU  - Bunday Benjamin
C2  - Measurement Science and Technology
DA  - 2018-09-27
DO  - https://doi.org/10.1088/1361-6501/aae4c2
LA  - en
M1  - 29
PB  - Measurement Science and Technology
PY  - 2018
TI  - Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy Optical Microscopy
ER  -