TY - JOUR AU - James Fedchak AU - Julia Scherschligt AU - Makfir Sefa AU - Nick Phandinh C2 - Journal of Vacuum Science and Technology A DA - 2015-04-03 LA - en M1 - 33 PB - Journal of Vacuum Science and Technology A PY - 2015 TI - Building a Spring-Transport Mechanism for Spinning Rotor Gauges ER -