TY  - CONF
AU  - Gerard Henein
AU  - Juraj Topolancik
AU  - Kerry
C2  - MRS Advances, Boston, MA
DA  - 2018-02-05
DO  - https://doi.org/10.1557/adv.2018.157
LA  - en
M1  - 3
PB  - MRS Advances, Boston, MA
PY  - 2018
TI  - High Quality Oxide Films Deposited at Room Temperature by Ion Beam Sputtering
ER  -