TY - SER AU - Thomas Wallis AU - Pavel Kabos C2 - Cambridge University Press, Cambridge, -1 DA - 2017-09-17 LA - en PB - Cambridge University Press, Cambridge, -1 PY - 2017 TI - Chapter 11. Dopant profiling in semiconductor nanoelectronics UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922346 ER -