TY  - JOUR
AU  - Brent Sperling
AU  - James Maslar
AU  - Sergei Ivanov
C2  - Journal of Vacuum Science and Technology A
DA  - 2018-04-26
LA  - en
PB  - Journal of Vacuum Science and Technology A
PY  - 2018
TI  - In situ infrared spectroscopy during La2O3 ALD using La(iPrCp)3 and H2O
ER  -