TY  - CONF
AU  - Lei Chen
AU  - Quandou Wang
AU  - Ulf Griesmann
C2  - 36th International Conference on Micro and Nano Engineering, Genoa, -1
DA  - 2011-01-11
LA  - en
PB  - 36th International Conference on Micro and Nano Engineering, Genoa, -1
PY  - 2011
TI  - Plasma Etching Uniformity Control for Making Large and Thick Dual-Focus Zone Plates
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905958
ER  -