TY - JOUR AU - Joseph Hagmann AU - Xiqiao Wang AU - Pradeep Namboodiri AU - Jonathan Wyrick AU - Roy Murray AU - Michael Stewart AU - Richard Silver C2 - Physical Review Applied DA - 2018-01-23 LA - en PB - Physical Review Applied PY - 2018 TI - Weak localization thickness measurements of embedded phosphorus delta layers in silicon produced by PH3 dosing ER -