TY - JOUR AU - James Maslar AU - William Kimes AU - Brent Sperling AU - Ravindra Kanjolia C2 - Applied Spectroscopy DA - 2017-12-01 DO - https://doi.org/10.1177/0003702817716939 LA - en M1 - 71 PB - Applied Spectroscopy PY - 2017 TI - Non-dispersive infrared gas analyzer for vapor density measurements of a carbonyl-containing organometallic cobalt precursor ER -