TY  - JOUR
AU  - Frank DelRio
AU  - Lawrence Friedman
AU  - Michael Gaither
AU  - William Osborn
AU  - Robert Cook
C2  - Journal of Applied Physics
DA  - 2013-09-19
LA  - en
PB  - Journal of Applied Physics
PY  - 2013
TI  - Decoupling small-scale roughness and long-range features on deep reactive ion etched silicon surfaces
ER  -