TY - CHAP AU - Chukwudi Okoro AU - Yaw Obeng C2 - ECS Transactions (ECST), The Electrochemical Society, Pennington, NJ DA - 2013-07-30 DO - https://doi.org/10.1149/1.3700887 LA - en M1 - 45 PB - ECS Transactions (ECST), The Electrochemical Society, Pennington, NJ PY - 2013 TI - Impact of Thermal Stability of Isolation Liner on the Electrical Characteristics of TSVs ER -