TY  - JOUR
AU  - Daniel Sunday
AU  - Matthew Hammond
AU  - Chengqing Wang
AU  - Wen-Li Wu
AU  - Regis Kline
AU  - Gila Stein
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2013-07-15
LA  - en
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2013
TI  - 3D X-ray Metrology for Block Copolymer Lithography Line-Space Patterns
ER  -