TY - JOUR AU - Nien Zhang AU - Bryan Barnes AU - Hui Zhou AU - Mark AU - Richard Silver C2 - Measurement Science and Technology DA - 2017-04-07 DO - https://doi.org/10.1088/1361-6501/aa5586 LA - en M1 - 28 PB - Measurement Science and Technology PY - 2017 TI - Combining model-based measurement results of critical dimensions from multiple tools ER -