TY - JOUR AU - Lawrence Friedman AU - Wen-Li Wu AU - Wei-En Fu AU - Yunsan Chien C2 - Applied Physics Letters DA - 2017-09-22 DO - https://doi.org/10.1063/1.4991696 LA - en M1 - 111 PB - Applied Physics Letters PY - 2017 TI - Reflective Small Angle Electron Scattering to Characterize Nanostructures on Opaque Substrate ER -