TY - CONF AU - Joseph Hagmann AU - Xiqiao Wang AU - Pradeep Namboodiri AU - Jonathan Wyrick AU - Roy Murray AU - Michael Stewart AU - Richard Silver AU - Curt Richter C2 - 59th Electronic Materials Conference, Notre Dame, IN DA - 2017-06-29 LA - en PB - 59th Electronic Materials Conference, Notre Dame, IN PY - 2017 TI - Towards single atom devices for quantum information and metrology: weak localization in embedded phosphorus delta layers in silicon ER -