TY - CONF AU - Joseph Hagmann AU - Xiqiao Wang AU - Pradeep Namboodiri AU - Richard Silver AU - Curt Richter C2 - International Semiconductor Device Research Symposium 2016, Bethesda, MD DA - 2016-12-07 LA - en PB - International Semiconductor Device Research Symposium 2016, Bethesda, MD PY - 2016 TI - Atomically precise device fabrication ER -