TY  - CONF
AU  - Joseph Kopanski
AU  - Lin You
AU  - Yaw Obeng
C2  - The 2017 International Conference on Frontiers of Characterization and Metrology for 
Nanoelectronics, Monterey, CA
DA  - 2017-03-21
LA  - en
PB  - The 2017 International Conference on Frontiers of Characterization and Metrology for 
Nanoelectronics, Monterey, CA
PY  - 2017
TI  - Reference Materials to Enable Precise and Accurate Imaging with Electrical Scanning Probe Microscopes
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922980
ER  -