TY  - JOUR
AU  - Mark Sobolewski
AU  - David Lahr
C2  - Journal of Vacuum Science and Technology A
DA  - 2012-07-23
LA  - en
M1  - 30
PB  - Journal of Vacuum Science and Technology A
PY  - 2012
TI  - Origin of Electrical Signals for Plasma Etching Endpoint Detection: Comparison of Endpoint Signals and Electron Density
ER  -