TY  - CONF
AU  - Mark Sobolewski
AU  - J. Kim
C2  - 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases, Granada, ES
DA  - 2008-07-15
LA  - en
PB  - 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases, Granada, ES
PY  - 2008
TI  - Electron heating in rf-biased, inductively coupled plasmas
ER  -