TY  - JOUR
AU  - James Maslar
AU  - William Kimes
AU  - Brent Sperling
C2  - Applied Spectroscopy
DA  - 2012-03-01
DO  - https://doi.org/10.1366/11-06473
LA  - en
M1  - 66
PB  - Applied Spectroscopy
PY  - 2012
TI  - Quantum Cascade Laser-Based Measurement of Metal Alkylamide Density During Atomic Layer Deposition
ER  -