TY  - JOUR
AU  - William Kimes
AU  - James Maslar
AU  - Elizabeth Moore
C2  - Review of Scientific Instruments
DA  - 2012-08-13
DO  - https://doi.org/10.1063/1.4742991
LA  - en
M1  - 83
PB  - Review of Scientific Instruments
PY  - 2012
TI  - Perpendicular-Flow, Single-Wafer Atomic Layer Deposition Reactor Chamber Design for use with In Situ Diagnostics
ER  -