TY  - CONF
AU  - Shannon Hill
AU  - Nadir Faradzhev
AU  - Charles Tarrio
AU  - Thomas Lucatorto
AU  - T. Madey
AU  - B. Yakshinskiy
AU  - E. Loginova
AU  - S. Yulin
C2  - Proceedings of SPIE:  Emerging Lithographic Technologies XII, San Jose, CA
DA  - 2008-10-01
LA  - en
M1  - 6921
PB  - Proceedings of SPIE:  Emerging Lithographic Technologies XII, San Jose, CA
PY  - 2008
TI  - Accelerated Lifetime Metrology of EUV Multilayer Mirrors in Hydrocarbon Environments
ER  -