TY  - CONF
AU  - Shannon Hill
AU  - Nadir Faradzhev
AU  - Charles Tarrio
AU  - Thomas Lucatorto
AU  - Robert Bartynski
AU  - B.
AU  - T.
C2  - Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA
DA  - 2009-10-01
LA  - en
M1  - 7271
PB  - Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA
PY  - 2009
TI  - Measuring the EUV-induced contamination rates of TiO2-capped multilayer optics by anticipated production-environment hydrocarbons
ER  -