TY - JOUR AU - Ndubuisi Orji AU - Ronald Dixson AU - Boon AU - Andras Vladar AU - Michael Postek C2 - Journal of Micro/Nanolithography, MEMS, and MOEMS DA - 2016-12-15 DO - https://doi.org/10.1117/1.JMM.15.4.044006 LA - en M1 - 15 PB - Journal of Micro/Nanolithography, MEMS, and MOEMS PY - 2016 TI - Contour Metrology using Critical Dimension Atomic Force Microscopy ER -