TY  - JOUR
AU  - Yung-Tsun Lee
C2  - International Journal of Advanced Manufacturing Technology
DA  - 2016-11-30
DO  - https://doi.org/10.1007/s00170-016-9674-1
LA  - en
PB  - International Journal of Advanced Manufacturing Technology
PY  - 2016
TI  - Process Control Model for Growth Rate of Molecular Beam Epitaxy of MgO (111) Nanoscale Thin Films on 6H-SiC (0001) Substrates
ER  -