TY  - JOUR
AU  - Ndubuisi Orji
AU  - Ronald Dixson
AU  - Domingo Garcia-Gutierrez
AU  - Bunday Benjamin
AU  - M Bishop
AU  - Michael Cresswell
AU  - Richard Allen
AU  - John Allgair
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2016-10-13
DO  - https://doi.org/10.1117/1.JMM.15.4.044002
LA  - en
M1  - 15
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2016
TI  - Transmission Electron Microscope Calibration Methods for Critical Dimension Standards
ER  -