TY  - GEN
AU  - Grady White
AU  - Adrian Verwolf
AU  - Chris Poling
AU  - Nicholas Barbosa
AU  - Nikki Rentz
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2015-12-15
DO  - https://doi.org/10.6028/jres.120.021
LA  - en
M1  - 120
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2015
TI  - Potential Stable Low-Permeation Rate Standard Based on Micro-machined Silicon
ER  -