TY  - JOUR
AU  - Shinichiro Muramoto
AU  - Joseph Bennett
C2  - Surface and Interface Analysis
DA  - 2016-09-28
DO  - https://doi.org/10.1002/sia.6187
LA  - en
PB  - Surface and Interface Analysis
PY  - 2016
TI  - Low Temperature Plasma for Compositional Depth Profiling of Thin Inorganic Multilayers
ER  -