TY  - CHAP
AU  - Michael Postek
C2  - Handbook of Mask Making Technology, Edited by: Syed Rizvi, , 
DA  - 2004-04-07
LA  - en
PB  - Handbook of Mask Making Technology, Edited by: Syed Rizvi, , 
PY  - 2004
TI  - Photomask Critical Dimension Metrology in the Scanning Electron Microscope, Chapter in: Handbook of Mask Making Technology, Edited by: Syed Rizvi
ER  -