TY  - SER
AU  - Christopher Soles
AU  - Hae-Jeong Lee
AU  - B Vogt
AU  - Eric Lin
AU  - Wen-Li Wu
C2  - Dielectric Films for Advanced Microelectronics   Book Chapter| John Wiley and Sons Publisher, 
DA  - 2007-03-06
LA  - en
PB  - Dielectric Films for Advanced Microelectronics   Book Chapter| John Wiley and Sons Publisher, 
PY  - 2007
TI  - Structure Characterization of Nanoporous Interlevel Dielectric Thin Films With X-Ray and Neutron Radiation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852526
ER  -