TY - JOUR AU - Craig Copeland AU - Craig McGray AU - Jon Geist AU - Vladimir Aksyuk AU - Samuel Stavis C2 - Microsystems & Nanoengineering DA - 2016-09-12 DO - https://doi.org/10.1038/micronano.2016.55 LA - en M1 - 2 PB - Microsystems & Nanoengineering PY - 2016 TI - Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales ER -