TY  - ICOMM
AU  - John Villarrubia
C1  - http://www.nist.gov/mml/mmsd/workshop-on-quantification-of-uncertainties-in-material-science.cfm
C2  - NIST Materials Science Lab Portal
DA  - 2016-07-01
LA  - en
PB  - NIST Materials Science Lab Portal
PY  - 2016
TI  - Uncertainties in Nanometer-Scale Dimensional Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920183
ER  -