TY  - JOUR
AU  - Shinichiro Muramoto
AU  - Timothy Brewer
AU  - Matthew Staymates
AU  - John Gillen
C2  - Analytical Letters
DA  - 2012-11-08
LA  - en
PB  - Analytical Letters
PY  - 2012
TI  - Ambient Low Temperature Plasma Etching of Polymer Films for Virtually Damage-free SIMS Molecular Depth Profiling
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911996
ER  -