TY  - JOUR
AU  - Adam Hannon
AU  - Daniel Sunday
AU  - Donald Windover
AU  - Regis Kline
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2016-07-07
DO  - https://doi.org/10.1117/1.JMM.15.3.034001
LA  - en
M1  - 15
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2016
TI  - Advancing X-Ray Scattering Metrology Using Inverse Genetic Algorithms
ER  -