TY - JOUR AU - Michael Vissers AU - Jeffrey Kline AU - Jiansong Gao AU - David Wisbey AU - David Pappas C2 - Applied Physics Letters DA - 2012-02-20 DO - https://doi.org/10.1063/1.3683552 LA - en M1 - 100 PB - Applied Physics Letters PY - 2012 TI - Reduced microwave loss in trenched superconducting coplanar waveguides ER -