TY  - CONF
AU  - Ronald Dixson
AU  - Ryan Goldband
AU  - Ndubuisi Orji
C2  - SPIE Proceedings: Scanning Microscopies 2015, Monterey , CA
DA  - 2015-10-21
DO  - https://doi.org/10.1117/12.2199169
LA  - en
M1  - 9636
PB  - SPIE Proceedings: Scanning Microscopies 2015, Monterey , CA
PY  - 2015
TI  - Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit
ER  -