TY - JOUR AU - Ronald Dixson AU - Ndubuisi Orji AU - Ryan Goldband C2 - Journal of Micro/Nanolithography, MEMS, and MOEMS DA - 2016-01-25 LA - en M1 - 15 PB - Journal of Micro/Nanolithography, MEMS, and MOEMS PY - 2016 TI - Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit ER -