TY  - JOUR
AU  - Tariq Ahmido
AU  - William Kimes
AU  - Brent Sperling
AU  - Joseph Hodges
AU  - James Maslar
C2  - Journal of Vacuum Science and Technology A
DA  - 2016-05-02
LA  - en
PB  - Journal of Vacuum Science and Technology A
PY  - 2016
TI  - In-Situ Metrology to Characterize Water Vapor Delivery during Atomic Layer Deposition
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920093
ER  -