TY  - JOUR
AU  - Charles Ehrlich
C2  - Journal of Vacuum Science & Technology A
DA  - 1986-04-28
DO  - https://doi.org/10.1116/1.574081
LA  - en
PB  - Journal of Vacuum Science & Technology A
PY  - 1986
TI  - A note on flow rate and leak rate units
ER  -