TY  - JOUR
AU  - Charles Ehrlich
C2  - Journal of Vacuum Science & Technology A
DA  - 1992-01-01
LA  - en
PB  - Journal of Vacuum Science & Technology A
PY  - 1992
TI  - Recommended practices for the calibration and use of leaks
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921266
ER  -