TY  - JOUR
AU  - Charles Tilford
AU  - Charles Ehrlich
AU  - K McCulloh
AU  - F Long
C2  - Journal of Vacuum Science & Technology A
DA  - 1987-05-01
LA  - en
PB  - Journal of Vacuum Science & Technology A
PY  - 1987
TI  - Low-range flowmeters for use with vacuum and leak standards
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921267
ER  -