TY  - JOUR
AU  - S Tison
C2  - Journal of Vacuum Science & Technology A
DA  - 1996-01-05
LA  - en
PB  - Journal of Vacuum Science & Technology A
PY  - 1996
TI  - A critical evalution of thermal mass flow meters
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920804
ER  -