TY  - CONF
AU  - Ward Johnson
AU  - Thomas Wallis
AU  - Pavel Kabos
AU  - Eduard Rocas
AU  - Juan Collado
AU  - Li-Anne Liew
AU  - Albert Davydov
AU  - Alivia Plankis
AU  - Paul Heyliger
C2  - IEEE Frequency Control Symposium, Baltimore, MD
DA  - 2012-05-21
DO  - https://doi.org/10.1109/FCS.2012.6243722
LA  - en
PB  - IEEE Frequency Control Symposium, Baltimore, MD
PY  - 2012
TI  - A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide
ER  -