TY - CONF AU - Damazo, Bradley AU - Ming, Bin AU - Kavuri, Premsagar AU - Vladar, Andras AU - Postek, Michael C2 - IEEE Nano 2011, Portland, OR DA - 2011-08-18 DO - https://doi.org/10.1109/NANO.2011.6144666 LA - en M1 - 2011 PB - IEEE Nano 2011, Portland, OR PY - 2011 TI - Accurate Nanometer-Scale Imaging and Measurements with SEM ER -