TY  - CONF
AU  - Thomas Wallis
AU  - Atif Imtiaz
AU  - Alexandra Curtin
AU  - Pavel Kabos
AU  - Matthew Brubaker
AU  - Norman Sanford
AU  - Kristine Bertness
C2  - Digest of the 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
DA  - 2013-03-25
LA  - en
PB  - Digest of the 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
PY  - 2013
TI  - Spatially-Resolved Dopant Characterization with a Scanning Microwave Microscope
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912802
ER  -