TY - JOUR AU - Eduard Rocas AU - Juan Collado AU - Jordi Mateu AU - Nathan Orloff AU - Alberto Padilla AU - Juan Callaghan AU - James Booth AU - Robert Aigner C2 - IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control DA - 2008-06-15 DO - https://doi.org/10.1109/MWSYM.2008.4633288 LA - en PB - IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control PY - 2008 TI - Third order Intermodulation Distortion in Film Bulk Acoustic Resonators at Resonance and Antiresonance ER -