TY  - JOUR
AU  - Shannon Duff
AU  - Gene Hilton
AU  - Johannes Hubmayr
AU  - James Beall
AU  - Jason Austermann
AU  - Daniel Becker
AU  - Jeffrey Van
C2  - Journal of Low Temperature Physics
DA  - 2015-07-22
LA  - en
PB  - Journal of Low Temperature Physics
PY  - 2015
TI  - Advanced ACTPol Multichroic Polarimeter Array Fabrication Process for 150 mm Wafers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919372
ER  -