TY  - JOUR
AU  - Bryan Barnes
AU  - Martin Sohn
AU  - Francois Goasmat
AU  - Hui Zhou
AU  - Andras Vladar
AU  - Richard Silver
AU  - Abraham Arceo
C2  - Optics Express
DA  - 2013-10-25
DO  - https://doi.org/10.1364/OE.21.026219
LA  - en
M1  - 21
PB  - Optics Express
PY  - 2013
TI  - Three-dimensional deep sub-wavelength defect detection using (lambda) = 193 nm optical microscopy
ER  -