TY  - CONF
AU  - Liya Yu
AU  - Richard Kasica
AU  - Robert Newby
AU  - Lei Chen
AU  - Vincent Luciani
C2  - SPIE Advanced Lithography, San Jose, CA
DA  - 2013-03-29
DO  - https://doi.org/10.1117/12.2011681
LA  - en
M1  - 8682
PB  - SPIE Advanced Lithography, San Jose, CA
PY  - 2013
TI  - The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure
ER  -