TY  - JOUR
AU  - Mark
AU  - Richard Silver
AU  - John Villarrubia
AU  - Nien Zhang
AU  - Hui Zhou
AU  - Bryan Barnes
AU  - Andras Vladar
AU  - Bin Ming
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2015-11-12
DO  - https://doi.org/10.1117/1.JMM.14.4.044001
LA  - en
M1  - 14
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2015
TI  - Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression.
ER  -