TY  - CONF
AU  - Felipe Guzman
AU  - Yiliang Bao
AU  - Jason Gorman
AU  - John Lawall
AU  - Jacob Taylor
AU  - Thomas LeBrun
C2  - Proceedings ASPE 2015 Summer Topical Meeting, Precision Interferometric Metrology, Golden, CO
DA  - 2015-07-08
LA  - en
PB  - Proceedings ASPE 2015 Summer Topical Meeting, Precision Interferometric Metrology, Golden, CO
PY  - 2015
TI  - MEMS optomechanical accelerometry standards
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918899
ER  -